CMOS-integrated high-speed MSM germanium waveguide photodetector

Reflectively Coupled Waveguide Photodetector for High Speed Optical Interconnection

To fully utilize GaAs high drift mobility, techniques to monolithically integrate In0.53Ga0.47As p-i-n photodetectors with GaAs based optical waveguides using total internal reflection coupling are reviewed. Metal coplanar waveguides, deposited on top of the polyimide layer for the photodetector's planarization and passivation, were then uniquely connected as a bridge between the photonics and ...

High-speed polysilicon CMOS photodetector for telecom and datacom

42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide.

A compact pin Ge photodetector is integrated in submicron SOI rib waveguide. The detector length is reduced down to 15 microm using butt coupling configuration which is sufficient to totally absorb light at the wavelength of 1.55 microm. A -3 dB bandwidth of 42 GHz has been measured at a 4V reverse bias with a responsivity as high as 1 A/W at the wavelength of 1.55 microm and a low dark current...

High speed and high power polarization insensitive germanium photodetector with lumped structure.

We propose and demonstrate a high speed and high power polarization insensitive germanium photodetector (Ge PD) with lumped structure based on related parallel Ge absorption regions. Two absorption regions are double sides illuminated to optimize the space charge density and the two dimensional (2D) grating coupler is adopted for both coupling and polarization independent operation. Being diffe...

Vertical p-i-n germanium photodetector with high external responsivity integrated with large core Si waveguides.

We report a vertical p-i-n thin-film germanium photodetector integrated on 3microm thick large core silicon-on-insulator (SOI) waveguides. The device demonstrates very high external responsivity due to the low fiber coupling loss to the large core waveguides. The germanium width and thickness are carefully designed to achieve high responsivity yet retain high-speed performance. Even with fiber ...